Complex MEMS: a fully integrated TOF micro mass spectrometer-Reference-Cited by-同舟云学术

Complex MEMS: a fully integrated TOF micro mass spectrometer

Published:2007-07 Issue:1 Volume:138 Page:22-27
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Wapelhorst Eric,Hauschild Jan-Peter,Müller Jörg

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference14 articles.

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2. V. Relling, Untersuchungen zum Aufbau eines Mikromassenspektrometers, Dissertation, Hamburg University of Technology, Germany, 1997.

3. Mass Spectrometry;Gross,2004

4. A micromachined electron beam ion source;Petzold,2000

5. A fully integrated plasma electron source for micro mass spectrometers;Hauschild,2005

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