Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference13 articles.
1. MEMS-micropumps: a review;Nguyen;Trans. ASME,2002
2. Micropumps – summarizing the first two decades;Woias;Proc. SPIE,2001
3. LIGA micropump for gases and liquids;Rapp;Sens. Actuators A,1994
4. A self-priming and bubble-tolerant piezoelectric silicon micropump for liquids and gases;Linnemann,1998
5. Design and fabrication of a self-aligning gas/liquid micropump;Schabmueller;Proc. SPIE – Int. Soc. Opt. Eng. (USA),2000
Cited by
26 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献