A micromachined vapor jet pump

Author:

Doms M.,Mueller J.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference13 articles.

1. MEMS-micropumps: a review;Nguyen;Trans. ASME,2002

2. Micropumps – summarizing the first two decades;Woias;Proc. SPIE,2001

3. LIGA micropump for gases and liquids;Rapp;Sens. Actuators A,1994

4. A self-priming and bubble-tolerant piezoelectric silicon micropump for liquids and gases;Linnemann,1998

5. Design and fabrication of a self-aligning gas/liquid micropump;Schabmueller;Proc. SPIE – Int. Soc. Opt. Eng. (USA),2000

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