Author:
Yamashita Kaoru,Nishimoto Hiroki,Okuyama Masanori
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference9 articles.
1. PbTiO3thin film ultrasonic micro-sensor fabricated on Si wafer;Ohtani;Jpn. J. Appl. Phys. Suppl.,1984
2. Micromachined high frequency ferroelectric sonar transducers;Bernstein;IEEE Trans. Ultrason. Ferro. Freq. Cont.,1996
3. Study of PZT coated membrane structures for micromachined ultrasonic transducers;Muralt,2001
4. Arrayed ultrasonic microsensors with high directivity for in-air use using PZT thin film on silicon diaphragms;Yamashita;Sens. Actuators A: Phys.,2002
5. Ultrasonic phased-array sensor using PZT thin film and three-dimensional object detection using BBD;Yamashita;J. Korean Phys. Soc.,2003
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