PbTiO3Thin Film Ultrasonic Micro-Sensor Fabricated on Si Wafer-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

PbTiO3Thin Film Ultrasonic Micro-Sensor Fabricated on Si Wafer

Published:1984-01-01 Issue:S1 Volume:23 Page:133
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:
Short-container-title:Jpn. J. Appl. Phys.

Author:

Ohtani Kohzo,Okuyama Masanori,Hamakawa Yoshihiro

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Cited by 24 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Ferroelectric properties and structural characterisation of lead titanate thin films prepared by polymeric precursor method;Advances in Materials and Processing Technologies;2021-08-26

2. Miniature Ultrasonic and Tactile Sensors for Dexterous Robot;Transactions on Electrical and Electronic Materials;2012-10-25

3. Buckling control of silicon dioxide diaphragms by lateral stress enhancement for sensitivity improvement of piezoelectric ultrasonic microsensors;Sensors and Actuators A: Physical;2011-01

4. Sensitivity Change on Piezoelectric Ultrasonic Microsensors by Variation of Diaphragm Structures;Journal of the Korean Physical Society;2009-08-14

5. Raman Spectroscopy Study of Oxygen Vacancies in PbTiO3Thin Films Generated Heat-Treated in Hydrogen Atmosphere;Japanese Journal of Applied Physics;2008-09-19

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP