Author:
Yamashita K.,Watanabe T.,Yoshizaki T.,Noda M.,Okuyama M.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference14 articles.
1. Silicon micromachined ultrasonic transducers;Khuri-Yakub;Jpn. J. Appl. Phys.,2000
2. Developement of capacitive ultrasonic sensor with parylene diaphragm using micromachining technique;Aoyagi;Jpn. J. Appl. Phys.,2007
3. The microfabrication of capacitive ultrasonic transducers;Jin;IEEE J. Microelectromech. Syst.,1998
4. Comparison of piezoresistive and capacitive ultrasonic transducers;Neumann,2004
5. Thin and small ultrasonic distance sensor with thermoacoustic transmitter and piezoresistive cantilever receiver;Hashimoto,2008
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