Realization of a composite MEMS hydrophone without left-right ambiguity

Author:

Liu Mengran,Nie Lei,Zhang Guojun,Zhang Wendong,Zou Jing

Funder

NSFC

National Key Research and Development Program of China

China Postdoctoral Science Foundation

Scientific Research Foundation for Doctoral Program of Hubei University of Technology

Open foundation of State Key Lab of Digital Manufacturing Equipment & Technology

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference19 articles.

1. Micromachined Transducers Sourcebook;Zhang,2005

2. Research on double T-shape MEMS bionic vector hydrophone and its application in obstacle avoidance sonar;Liu;Sens. Rev.,2015

3. A ‘fitness-wheel-shaped’ MEMS vector hydrophone for 3D spatial acoustic orientation;Wang;J. Micromech. Microeng.,2017

4. A Microfabricated Electron- Tunneling Accelerometer as a Directional Underwater Acoustic Sensor;Rockstad,1996

5. Advancements in technology and design of NEMS vector hydrophone;Guan;Microsyst. Technol.,2011

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