Author:
Grzebyk T.,Górecka-Drzazga A.
Funder
The Wroclaw University of Technology
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference29 articles.
1. Miniature and MEMS-type vacuum sensors and pumps;Górecka-Drzazga;Vacuum,2009
2. Optical leak detection for wafer level hermeticity testing;Elger;IEEE Semiconductor International Electronics Manufacturing Technology Symposium,2004
3. Study of porous silicon, silicon carbide and DLC coated field emitters for pressure sensor application;Kleps;Solid-State Electron.,2001
4. Catalog of MEMS silicon pressure sensors, BMC Sensor Technologies, www.bmcsensor.com.
5. Microstructured vacuum gauges and their future perspectives;Volklein;Vacuum,2008
Cited by
25 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献