Author:
Fang Zhengxiang,Yin Yonggang,He Xiaofei,Han Fengtian,Liu Yunfeng
Funder
National Natural Science Foundation of China
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference30 articles.
1. Research of MEMS accelerometers features in mobile phone;Grankin;2012 12th Conference of Open Innovations Association (FRUCT) and Seminar on e-Travel,2012
2. MEMS accelerometer: from engineering to medicine;Roy;IEEE Potentials,2016
3. MEMS inertial sensors: a tutorial overview;Shaeffer;IEEE Commun. Mag.,2013
4. Advanced Mechatronics and MEMS Devices II;Albarbar,2017
5. A vacuum packaged surface micromachined resonant accelerometer;Seshia;J. Microelectromech. Syst.,2002
Cited by
17 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献