A micrometer scale and low temperature PZT thick film MEMS process utilizing an aerosol deposition method-Reference-Cited by-同舟云学术

A micrometer scale and low temperature PZT thick film MEMS process utilizing an aerosol deposition method

Published:2008-05 Issue:2 Volume:143 Page:469-474
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Wang Xuan-Yu,Lee Chi-Yuan,Peng Cheng-Jien,Chen Pei-Yen,Chang Pei-Zen

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference24 articles.

1. Self-assembly of PZT actuators for micropumps with high process repeatability;Fang;J. Microelectromech. Syst.,2006

2. A cylindrical shaped micro ultrasonic motor utilizing PZT thin film;Morita;Sens. Actuators A,2000

3. A flat type touch probe sensor using PZT thin film vibrator;Kanda;Sens. Actuators A,2000

4. MEMS power generator with transverse mode thin film PZT;Jeon;Sens. Actuators A,2005

5. Fabrication and characterization of the piezoelectric microtransformer based on microelectromechanical systems;Kim;Appl. Phys. Lett.,2006

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