A flat type touch probe sensor using PZT thin film vibrator-Reference-Cited by-同舟云学术

A flat type touch probe sensor using PZT thin film vibrator

Published:2000-05 Issue:1-3 Volume:83 Page:67-75
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Kanda T.,Morita T.,Kurosawa M.K.,Higuchi T.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference11 articles.

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2. Resonator-based touch-sensitive probe;Harb;Sens. Actuators A,1995

3. Dependence on directions of the sensitivity of the vibrational touch sensor;Nishimura;Proc. Ann. Spring Meeting JSPE, 1994,1994

4. A rod-shaped vibro touch sensor using PZT thin film;Kanda;IEEE Trans. UFFC,1999

5. Preparation of lead zirconate titanate thin film by hydrothermal method;Shimomura;Jpn. J. Appl. Phys.,1991

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