Multi stage noise shaping sigma–delta modulator (MASH) for capacitive MEMS accelerometers-Reference-Cited by-同舟云学术

Multi stage noise shaping sigma–delta modulator (MASH) for capacitive MEMS accelerometers

Published:2012-10 Issue: Volume:186 Page:169-177
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Almutairi Bader,Kraft Michael

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference34 articles.

1. A high-performance accelerometer with a fifth-order sigma–delta modulator;Dong;Journal of Micromechanics and Microengineering,2005

2. A fourth-order sigma–delta interface circuit for closed-loop micromachined accelerometer;Liu,2009

3. Ultra-high precision MEMS accelerometer;Dong,2011

4. A fourth order unconstrained ΣΔ capacitive accelerometer;Sonmez,2011

5. Delta Sigma Modulator: Modeling, Design, and Applications;Bourdopoulos,2003

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5. Adaptive On-Line Self-Calibration of Errors in Multi-Stage-Noise-Shaping (MASH) Sigma-Delta Modulator Gyroscope;2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS);2020-01