Fabrication of miniaturized bi-convex quartz crystal microbalance using reactive ion etching and melting photoresist-Reference-Cited by-同舟云学术

Fabrication of miniaturized bi-convex quartz crystal microbalance using reactive ion etching and melting photoresist

Published:2004-09 Issue:2-3 Volume:114 Page:496-500
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Li Li,Abe Takashi,Esashi Masayoshi

Funder

Ministry of Education, Culture, Sports, Science and Technology

Precursory Research for Embryonic Science and Technology

Japan Science and Technology Corporation

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference11 articles.

1. Verwendung von schwingquarsen zur wängung dünner schichten und zur mikrowängung;Sauerbrey;Z. Phys.,1959

2. Trapped-energy modes in quartz filter crystals;Shockley;J. Acoust. Soc. Am.,1967

3. Frequency–temperature behavior of stepped bi-mesa-shaped at-cut quartz resonators;Goka;Jpn. J. Appl. Phys.,2000

4. L. Li, T. Abe, M. Esashi, High sensitive, miniaturized plano-convex quartz crystal microbalance fabricated by reactive ion etching and melting photoresist, in: Proceedings of the Transducers’03, pp. 508–511.

5. Electrical characterisation of high-frequency thickness-shear-mode resonators by impedance analysis;Zimmermann;Sens. Actuators B,2001

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