MEMS based digital variable capacitors with a high-k dielectric insulator-Reference-Cited by-同舟云学术

MEMS based digital variable capacitors with a high-k dielectric insulator

Published:2006-11 Issue:1 Volume:132 Page:139-146
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Luo J.K.,Lin M.,Fu Y.Q.,Wang L.,Flewitt A.J.,Spearing S.M.,Fleck N.A.,Milne W.I.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference22 articles.

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3. Micromachined microwave actuator (MIMIAC) technology—a new tuning approach for microwave integrated circuits;Larson,1991

4. Design and modelling of RF MEMS tunable capacitors using electro-thermal actuators;Feng,1999

5. Micromachined varactor with wide tuning range;Dec;Electron. Lett.,1997

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