Development of a wide-tuning range and high Q variable capacitor using metal-based surface micromachining process-Reference-Cited by-同舟云学术

Development of a wide-tuning range and high Q variable capacitor using metal-based surface micromachining process

Published:2009-02 Issue:2 Volume:149 Page:193-200
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Huang I.-Yu,Sun Chian-Hao,Tasi Han-Cheng,Chou Che-Ya,Huang Chih-Sheng

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference28 articles.

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4. Miniature and tunable filters using MEMS capacitor;Abbaspour-Tamijani;IEEE Trans. Microwave Theory Tech.,2003

5. Analog tunable matching network using integrated thin-film BST capacitors;Chen,2004

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