Author:
Bhattacharya A.,Chakraborty Subha,Bhattacharyya T. K.
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference22 articles.
1. Bakri-Kassem M, Mansour RR (2009) Linear bilayer ALD coated MEMS varactor with high tuning capacitance ratio. J Microelectromech Syst 18(1):147–153
2. Carter J, Cowen A, Hardy B, Mahadevan R, Stonefield M, Wilcenski S (2005) PolyMUMPs design handbook: revision 11.0. MEMSCAP Inc., Durham
3. Chen J, Zou J, Liu C, Schutt-Ainé JE, Kang SM (2003) Design and modeling of a micromachined high-Q tunable capacitor with large tuning range and a vertical planar spiral inductor. IEEE Trans Electron Devices 50(3):730–739
4. Chen K, Liu X, Kovacs A, Chappell WJ, Peroulis D (2010) Antibiased electrostatic RF MEMS varactors and tunable filters. IEEE Trans Microw Theory Tech 58(12):3971–3981
5. Dec A, Suyama K (1997) Micromachined varactor with wide tuning range. Electron Lett 33(11):922–924