Design, fabrication and characterization of an externally actuated ON/OFF microvalve-Reference-Cited by-同舟云学术

Design, fabrication and characterization of an externally actuated ON/OFF microvalve

Published:2008-10 Issue:2 Volume:147 Page:600-606
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Casals-Terré J.,Duch M.,Plaza J.A.,Esteve J.,Pérez-Castillejos R.,Vallés E.,Gómez E.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

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4. Desgin, microfabrication and testing of a CMOS compatible bistable electromagnetic microvalve with latching/unlatching mechanism on a single wafer;Sutanto;Journal of Micromechanis and Engineering,2006

5. An electromagnetic actuated on/off microvalve fabricated on top of a single wafer;Bintoro;Journal of Micromechanis and Engineering,2005

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