Actuators: Accomplishments, opportunities and challenges-Reference-Cited by-同舟云学术

Actuators: Accomplishments, opportunities and challenges

Published:2019-08 Issue: Volume:295 Page:604-611
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Ceyssens Frederik,Sadeghpour Sina,Fujita Hiroyuki,Puers Robert

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference47 articles.

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3. Progress in Magnetic Microactuators;Guckel;Microsyst. Technol.,1998

4. Advances in European magnetic MEMS technology;Gatzen;Proc. 7th Int. Symposium on Magnetic Materials, ECS 2002,2002

5. Electrostatic-comb drive of lateral polysilicon resonators;Tang;Sens. Actuators,1990

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