Two- and three-dimensional microcoil fabrication process for three-axis magnetic sensors on flexible substrates-Reference-Cited by-同舟云学术

Two- and three-dimensional microcoil fabrication process for three-axis magnetic sensors on flexible substrates

Published:2006-11 Issue:1 Volume:132 Page:2-7
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Woytasik M.,Grandchamp J.-P.,Dufour-Gergam E.,Gilles J.-P.,Megherbi S.,Martincic E.,Mathias H.,Crozat P.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference9 articles.

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3. On-chip eddy current sensor for proximity sensing and crack detection;Sadler;Sens. Actuators A,2001

4. Development of a planar type micro electro magnetic distance sensor using high aspect ratio photoresist and its application;Ding,1999

5. Monolithic fabrication of electroplated solenoid inductors using three-dimensional photolithography of a thick phottoresist;Yoon;Jpn. J. Appl. Phys. 1,1998

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