Author:
Yoon Jun-Bo,Han Chul-Hi,Yoon Euisik,Kim Choong-Ki
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by
32 articles.
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1. MEMS lithography;Handbook of Silicon Based MEMS Materials and Technologies;2020
2. Light-absorbent liquid immersion angled exposure for patterning 3D samples with vertical sidewalls;Journal of Micromechanics and Microengineering;2017-01-13
3. MEMS Lithography;Handbook of Silicon Based MEMS Materials and Technologies;2015
4. Stretchable copper interconnects with three-dimensional coiled structures;Journal of Micromechanics and Microengineering;2013-11-14
5. Fabrication of 3D Micro Structure by Dual Diffuser Lithography;Korean Journal of Materials Research;2013-08-27