Behavior analysis of comb-drive actuators operating in near-zero-overlap configuration-Reference-Cited by-同舟云学术

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Behavior analysis of comb-drive actuators operating in near-zero-overlap configuration

Published:2024-10 Issue: Volume:376 Page:115652
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Marković A.^ORCID,Fanet H.,Pillonnet G.,Legrand B.

Publisher

Elsevier BV

Reference23 articles.

1. Understanding Smart Sensors;Frank,2013

2. MEMS actuators and sensors: Observations on their performance and selection for purpose;Bell;J. Micromech. Microeng.,2005

3. Advanced fiber optical switches using deep RIE (DRIE) fabrication;Li;Sensors Actuators A,2003

4. Chapter 4 - electrostatic actuation;Bao,2005

5. AFM imaging with an xy-micropositioner with integrated tip;Indermühle;Sensors Actuators A,1995

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