A novel single axis capacitive MEMS accelerometer with double-sided suspension beams fabricated using μWEDM

Author:

Tahmasebipour Mohammad,Vafaie Ali

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference37 articles.

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4. Sleep estimates using microelectromechanical systems (MEMS);te Lindert;Sleep,2013

5. A new multi-position calibration method for MEMS inertial navigation systems;Syed;Meas. Sci. Technol.,2007

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