Funder
City University of Hong Kong
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference22 articles.
1. Ultimate limits to inertial mass sensing based upon nanoelectromechanical systems;Ekinci;Journal of Applied Physics,2004
2. A high-Q length-extensional bulk-mode mass sensor with annexed sensing platforms;Hao,2006
3. Ultrasensitive mass balance based on a bulk acoustic mode silicon crystal silicon resonator;Lee;Applied Physics Letters,2007
4. MEMS technology for timing and frequency control;Nguyen;IEEE Transactions on Ultrasonics, Ferroelectronics, & Frequency Control,2007
5. Scalable 1. 1GHz fundamental mode piezo-resistive silicon MEMS resonator;van Beek,2007
Cited by
3 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献