1. CMOS-compatible capacitive high temperature pressure sensors[J];Kasten;Sensor Actuators A: Phys.,2000
2. Design, simulation and analysis of piezoresistive micro-pressure sensor for pressure range of 0 to 1MPa[C];Balavalad,2016
3. Piezoresistive CMOS Beams for Inertial Sensing[C]//Sensors;Chaehoi,2003
4. Characterization and Analysis of a Novel Structural SOI Piezoresistive Pressure Sensor with High Sensitivity and linearity[J];Li,2020
5. Design and simulation of a high sensitive stripped-shaped piezoresistive pressure sensor[J];Farhath;J. Comput. Electron.,2020