Dual-axis MEMS mirror for large deflection-angle using SU-8 soft torsion beam-Reference-Cited by-同舟云学术

Dual-axis MEMS mirror for large deflection-angle using SU-8 soft torsion beam

Published:2005-05 Issue:1 Volume:121 Page:16-21
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Fujita Takayuki,Maenaka Kazusuke,Takayama Yoichiro

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference6 articles.

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3. An Electromagnetic Optical Scanner with Polyimide-Based Hinges Dig. of Tech. Papers on Transducers ’99;Miyajima,1999

4. 2-DOF MEMS mirror for large deflection using SU-8 torsion beam conf. Proceedings of APCOT/MNT ’04;Fujita,2004

5. UV-LIGA Process for High Aspect Ratio Structure Using Stress Barrier and C-shaped Etch Hole Dig. of Tech. Papers on Transducers ’99;Chang,1999

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