Low cycle fatigue of Si3N4/SiO2/Si micro-cantilever beams-Reference-Cited by-同舟云学术

Low cycle fatigue of Si3N4/SiO2/Si micro-cantilever beams

Published:2010-06 Issue:1-2 Volume:161 Page:143-151
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Liu Hsien-Kuang,Chou Chi-Bin,Hwang Shun-Fa

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference29 articles.

1. High-cycle fatigue of single-crystal silicon thin films;Muhlstein;J. Microelectromech. Syst.,2001

2. Fatigue of polycrystalline silicon for microelectromechanical system applications: crack growth and stability under resonant loading conditions;Muhlstein;Mechanics of Materials,2004

3. Hsien-Kuang Liu, B. J. Lee and Pang-Ping Liu, “Low cycle fatigue of single crystal silicon thin films,” Sensors and Actuators A, 140 (2007) 257-265.

4. Mechanism of fatigue in micron-scale films of polycrystalline silicon for microelectromechanical systems;Muhlstein;Appl. Phys. Lett.,2002

5. Silicon MEMS components: a fatigue life assessment approach;Varvani-Farahani;Microsystem Technologies,2005

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1. A Rapid Fatigue Test Method on Micro Structures for High-Cycle Fatigue;IEEE Transactions on Device and Materials Reliability;2016-03

2. Effect of silicon nitride coating thickness on fatigue of silicon microbeams;Measurement;2014-04

3. Development of a fatigue test machine for high frequency applications;Procedia Engineering;2011