Micron-scale polymer–metal cantilever actuators fabricated by focused ion beam-Reference-Cited by-同舟云学术

Micron-scale polymer–metal cantilever actuators fabricated by focused ion beam

Published:2011-12 Issue:2 Volume:172 Page:462-470
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Lee C.C.,Alici G.,Spinks G.M.,Proust G.,Cairney J.M.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference32 articles.

1. Fabrication and operation of polyimide bimorph actuators for a ciliary motion system;Ataka;Journal of Microelectromechanical Systems,1993

2. Thermally actuated polymer micro robotic gripper for manipulation of biological cells;Chan,2003

3. Cantilever transducers as a platform for chemical and biological sensors;Lavrik;Review of Scientific Instruments,2004

4. Cantilever-like micromechanical sensors;Boisen;Reports on Progress in Physics,2011

5. Electromechanical transducers at the nanoscale: actuation and sensing of motion in nanoelectromechanical systems (NEMS);Ekinci;Small,2005

Cited by 10 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Improvement of MEMS Thermomechanical Actuation Efficiency by Focused Ion Beam-Induced Deposition;Journal of Microelectromechanical Systems;2024-06

2. Current and Future Trends for Polymer Micro/Nanoprocessing in Industrial Applications;Advanced Materials;2022-06-09

3. Plasma electrolytic oxidation of Ti-6Al-4V alloy and its influence on the machinability during micro-milling;Measurement;2021-01

4. Structural characterization and continuous cellular automata simulation of micro structures by focused Ga ion beam induced deposition process;Sensors and Actuators A: Physical;2020-09

5. The First 3-D-Printed z-Axis Accelerometers With Differential Capacitive Sensing;IEEE Sensors Journal;2018-01-01