Affiliation:
1. Department of Nanometrology, Wrocław University of Science and Technology, Wrocław, Poland
2. Advanced Technology Institute, University of Surrey, Guildford, U.K.
Funder
European Cooperation in Science and Technology Action
Focused Ion Technology for Nanomaterials
Short Term Scientific Mission Grant “Focused ion beam technology in fabrication of diamond tip-based scanning probe microscopy cantilevers”
Fabrication of the Microprobes within the National Science Centre, Poland NCN OPUS Grant through “Nanometrology of Notingham cooling effect using operational microelectromechanical systems”
Publisher
Institute of Electrical and Electronics Engineers (IEEE)