Realisation of very high voltage electrode–nozzle systems for MEMS-Reference-Cited by-同舟云学术

Realisation of very high voltage electrode–nozzle systems for MEMS

Published:2004-08 Issue:1 Volume:114 Page:112-117
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Paine M.D.,Gabriel S.,Schabmueller C.G.J.,Evans A.G.R.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference16 articles.

1. Breakdown of thin gate silicon dioxide films—a review;Nafria;Microelectron. Reliab.,1996

2. Ultra-thick gate oxides: charge generation and its impact on reliability;Schwalke;Microelectron. Reliab.,2001

3. Correlation between dielectric breakdown and charge generation in silicon dioxide films;Hayakawa;Appl. Phys. Lett.,1997

4. Impact ionization, trap creation, degradation, and breakdown in silicon dioxide films on silicon;Dimaria;J. Appl. Phys.,1993

5. Dielectric breakdown in electrically stressed thin films of thermal SiO2;Harari;J. Appl. Phys.,1976

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Fabrication and operation of a two-dimensional ion-trap lattice on a high-voltage microchip;Nature Communications;2014-04-04

2. Increased surface flashover voltage in microfabricated devices;Applied Physics Letters;2013-09-30

3. An Overview of Electrospray Applications in MEMS and Microfluidic Systems;Journal of Microelectromechanical Systems;2011-12

4. A Microfabricated Planar Electrospray Array Ionic Liquid Ion Source With Integrated Extractor;Journal of Microelectromechanical Systems;2009-06

5. Integrated out-of-plane nanoelectrospray thruster arrays for spacecraft propulsion;Journal of Micromechanics and Microengineering;2009-03-20