Vacuum behavior and control of a MEMS stage with integrated thermal displacement sensor-Reference-Cited by-同舟云学术

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Vacuum behavior and control of a MEMS stage with integrated thermal displacement sensor

Published:2015-10 Issue: Volume:234 Page:321-330
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Krijnen B.,Brouwer D.M.,Abelmann L.,Herder J.L.

Funder

Ministry for Economic Affairs

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference42 articles.

1. A thermal actuator for nanoscale in situ microscopy testing: design and characterization;Zhu;J. Micromech. Microeng.,2006

2. Practical factors affecting the performance of a thin-film phase plate for transmission electron microscopy;Danev;Ultramicroscopy,2009

3. In situ measurement of youngs modulus of carbon nanotubes inside a tem through a hybrid nanorobotic manipulation system;Nakajima;IEEE Trans. Nanotechnol.,2006

4. Design and fabrication of a planar three-dofs mems-based manipulator;de Jong;J. Microelectromech. Syst.,2010

5. Electrostatically driven vacuum-encapsulated polysilicon resonators. Part I. Design and fabrication;Legtenberg;Sens. Actuators A,1994

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