Author:
Hao Xiuchun,Maenaka Kazusuke,Takao Hidekuni,Higuchi Kohei
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference20 articles.
1. A batch-fabricated silicon capacitive pressure sensor transducer with low temperature sensitivity;Lee;IEEE Trans. Electron Devices,1982
2. Capacitive pressure sensors with stainless steel diaphragm and substrate;Chang;J. Micromech. Microeng.,2004
3. A batch-processed vacuum-sealed capacitive pressure sensor;Abhijeet,1997
4. A new SOI monolithic capacitive sensor for absolute and differential pressure measurements;Dimitropoulos;Sensors Actuators A,2005
5. A novel electrostatic servo capacitive vacuum sensor;Wang,1997
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