Theoretical and experimental investigation on performance enhancement effect for a novel capacitive pressure sensor with double-cavity-Reference-Cited by-同舟云学术

Theoretical and experimental investigation on performance enhancement effect for a novel capacitive pressure sensor with double-cavity

Published:2023-07-10 Issue:13 Volume:20 Page:20230187-20230187
ISSN:1349-2543
Container-title:IEICE Electronics Express
language:en
Short-container-title:IEICE Electron. Express

Author:

Hu Mengwen¹,Chen Pandi¹,Qu Xichun¹,Li Mengke¹,Duan Zhiyong¹,Ma Liuhong¹

Affiliation:

1. School of Physics and Microelectronics, Zhengzhou University

Publisher

Institute of Electronics, Information and Communications Engineers (IEICE)

Subject

Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

https://www.jstage.jst.go.jp/article/elex/20/13/20_20.20230187/_pdf

Reference29 articles.

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