AlN/GaN/Sapphire heterostructure for high-temperature packageless acoustic wave devices

Author:

Bartoli F.ORCID,Aubert T.,Moutaouekkil M.,Streque J.,Pigeat P.,Zhgoon S.ORCID,Talbi A.,Hage-Ali S.,M’Jahed H.,Elmazria O.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference34 articles.

1. Acoustic Wave Sensors;Ballantine,1997

2. Surface acoustic wave sensors for high-temperature applications;Hornsteiner;Proceedings of the 1998 IEEE International Frequency Control Symposium,1998

3. Stability of langasite regarding SAW applications above 800°C in air atmosphere;Aubert;Ultrasonics Symposium (IUS), 2012 IEEE International,2012

4. Pt-Ni / Pt-Zr electrodes for stable SAW resonator operation during repeated temperature cycling up to 1000°C;Da Cunha;2015 IEEE International Ultrasonics Symposium (IUS),2015

5. A numerical method to derive accurate temperature coefficients of material constants from high-temperature SAW measurements: application to langasite;Nicolay;IEEE Trans. Ultrason. Ferroelectr. Freq. Control,2013

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