High-Performance Acoustic Wave Devices on LiTaO<sub>3</sub>/SiC Hetero-Substrates-Reference-Cited by-同舟云学术

High-Performance Acoustic Wave Devices on LiTaO₃/SiC Hetero-Substrates

Published:2023-10 Issue:10 Volume:71 Page:4182-4192
ISSN:0018-9480
Container-title:IEEE Transactions on Microwave Theory and Techniques
language:
Short-container-title:IEEE Trans. Microwave Theory Techn.

Author:

Zhang Liping¹^ORCID,Zhang Shibin¹^ORCID,Wu Jinbo¹^ORCID,Zheng Pengcheng¹^ORCID,Zhou Hongyan¹,Yao Hulin¹^ORCID,Li Zhongxu¹^ORCID,Huang Kai¹,Sun Huarui²^ORCID,Ou Xin¹^ORCID

Affiliation:

1. State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China

2. School of Science, Harbin Institute of Technology, Shenzhen, China

Funder

National Key Research and Development Program of China

National Natural Science Foundation of China

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Condensed Matter Physics,Radiation

Link

http://xplorestaging.ieee.org/ielx7/22/10273174/10113763.pdf?arnumber=10113763

Reference59 articles.

1. AlN/3C-SiC Composite Plate Enabling High-Frequency and High-Q Micromechanical Resonators