Polymer microoptoelectromechanical systems: Accelerometers and variable optical attenuators-Reference-Cited by-同舟云学术

Polymer microoptoelectromechanical systems: Accelerometers and variable optical attenuators

Published:2008-07 Issue: Volume:145-146 Page:147-153
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Cadarso V.J.,Llobera A.,Villanueva G.,Seidemann V.,Büttgenbach S.,Plaza J.A.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference27 articles.

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2. A graphical representation of the piezoresistance coefficients in silicon;Kanda;IEEE. Trans. Electron Dev,1982

3. A vacuum packaged surface micromachined resonant accelerometer;Seshia;J. Microelectromech. Syst.,2002

4. A combined silicon fusion and glass/silicon anodic bonding for uniaxial capacitive Accelerometer;Peeters,1992

5. Improved integrated waveguide absorbance optodes for ion-selective sensing;Puyol;Anal. Chem.,2002

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