Linearization of the scanning field for 2D torsional micromirror by RBF neural network-Reference-Cited by-同舟云学术

Linearization of the scanning field for 2D torsional micromirror by RBF neural network

Published:2005-05 Issue:1 Volume:121 Page:230-236
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Zhao Yi,Tay Francis E.H.,Chau Fook Siong,Zhou Guangya

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference22 articles.

1. Scalable fiber optic switch using micromachined mirrors;Hagelin,1999

2. Polysilicon optical microscanners for laser scanning displays;Kiang;Sens. Actuators A,1998

3. A raster-scanning full-motion video display using polysilicon micromachined measured mirrors;Conant,1999

4. Silicon-micromachined scanning confocal optical microscope;Dickensheets;J. Microelectromech. Syst.,1998

5. Endoscopic optical coherence tomography based on a microelectromechanical mirror;Pan;Opt. Lett.,2001

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Second-order sliding mode control of a 2D torsional MEMS micromirror with sidewall electrodes;Journal of Micromechanics and Microengineering;2012-11-30

2. RBF Neural Network Optimized by Particle Swarm Optimization for Forecasting Urban Traffic Flow;2009 Third International Symposium on Intelligent Information Technology Application;2009

3. Linearization of a two-axis MEMS scanner driven by vertical comb-drive actuators;Journal of Micromechanics and Microengineering;2007-12-03

4. Fast and precise positioning of electrostatically actuated dual-axis micromirror by multi-loop digital control;Sensors and Actuators A: Physical;2006-11

5. A study of electrostatic spring softening for dual-axis micromirror;Optik;2006-08