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Linearization of a two-axis MEMS scanner driven by vertical comb-drive actuators

  • Published:2007-12-03 Issue:1 Volume:18 Page:015015
  • ISSN:0960-1317
  • Container-title:Journal of Micromechanics and Microengineering
  • language:
  • Short-container-title:J. Micromech. Microeng.

Author:

Tsai Jui-che,Lu Li-Cheng,Hsu Wei-Chi,Sun Chia-Wei,Wu Ming C

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Cited by 19 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Technical Design and Simulation of MEMS Scanner Based on Piezoelectric Actuator;2024 25th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE);2024-04-07

2. A 2-Dimensional MEMS Optical Scanner for Landing Laser Rader;AEROSPACE TECHNOLOGY JAPAN, THE JAPAN SOCIETY FOR AERONAUTICAL AND SPACE SCIENCES;2022

3. Modeling and Optimization of a Novel ScAlN-Based MEMS Scanning Mirror with Large Static and Dynamic Two-Axis Tilting Angles;Sensors;2021-08-17

4. Rotatory microgripper based on a linear electrostatic driving scheme;Microelectronic Engineering;2021-08

5. MEMS Scanning Mirrors for Optical Coherence Tomography;Photonics;2020-12-30
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