Nonlinear dynamics of vibrating MEMS-Reference-Cited by-同舟云学术

Nonlinear dynamics of vibrating MEMS

Published:2007-02 Issue:1 Volume:134 Page:98-108
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Braghin Francesco,Resta Ferruccio,Leo Elisabetta,Spinola Guido

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference16 articles.

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3. MEMS resonators that are robust to process-induced feature width variations;Liu;J. Microelectromech. Syst.,2002

4. Nonlinear mechanical effects in silicon longitudinal mode beam resonators;Kaajakari;Sens. Actuators A,2005

5. Effect of cubic nonlinearity on auto-parametrically amplified resonant MEMS mass sensor;Zhang;Sens. Actuators A,2002

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