Thermomechanical tensile characterization of Ti–Ni shape memory alloy films for design of MEMS actuator-Reference-Cited by-同舟云学术

Thermomechanical tensile characterization of Ti–Ni shape memory alloy films for design of MEMS actuator

Published:2007-09 Issue:1-2 Volume:139 Page:178-186
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Namazu Takahiro,Hashizume Akinobu,Inoue Shozo

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference9 articles.

1. Thin film shape memory alloy actuated micropumps;Benard;J. Microelectromech. Syst.,1998

2. Thin film shape memory alloy microactuators;Krulevitch;J. Microelectromech. Syst.,1996

3. Ti–Ni SMA film actuated Si cantilever beams for MEMS probe card;Namazu,2005

4. Analysis of thermomechanical behavior of shape memory alloys;Tanaka;Mechan. Mater.,1992

5. A thermomechanical sketch of shape memory effect: one-dimensional tensile behavior;Tanaka;Res. Mech.,1986

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