A MEMS multi-sensor chip for gas flow sensing-Reference-Cited by-同舟云学术

A MEMS multi-sensor chip for gas flow sensing

Published:2005-05 Issue:1 Volume:121 Page:253-261
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Xu Yong,Chiu Chen-Wei,Jiang Fukang,Lin Qiao,Tai Yu-Chong

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference22 articles.

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4. MEMS for pressure distribution studies of gaseous flows in microchannels;Liu,1995

5. Measurements and modeling of two-phase flow in microchannels with nearly constant heat flux boundary conditions;Zhang;J. Microelectromech. Syst.,2002

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