Fabrication and characterization of diamond AFM probe integrated with PZT thin film sensor and actuator-Reference-Cited by-同舟云学术

Fabrication and characterization of diamond AFM probe integrated with PZT thin film sensor and actuator

Published:2004-09 Issue:2-3 Volume:114 Page:398-405
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Shibata Takayuki,Unno Kazuya,Makino Eiji,Shimada Shiro

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference19 articles.

1. Atomic force microscope;Bining;Phys. Rev. Lett.,1986

2. Image of local thermal and electrical conductivity with scanning force microscopy;Maywald;Scan. Microsc.,1994

3. Mapping the influence of stress on the surface elasticity with an atomic force microscope;Finot;Appl. Phys. Lett.,1998

4. Centimeter scale atomic force microscope imaging and lithography;Minne;Appl. Phys. Lett.,1998

5. Atomic force microscope as a tool for metal surface modifications;Göbel;J. Vac. Sci. Technol. B,1995

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