A novel gas flow sensing application using piezoelectric ZnO thin films deposited on Phynox alloy-Reference-Cited by-同舟云学术

A novel gas flow sensing application using piezoelectric ZnO thin films deposited on Phynox alloy

Published:2012-11 Issue: Volume:187 Page:194-200
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Joshi Sudeep,Parmar Mitesh,Rajanna K.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference15 articles.

1. Miniaturized thermal flow sensor with planar-integrated sensor structures on semicircular surface channels;Dijkstra;Sensors and Actuators A,2008

2. Fiber Bragg grating sensor for detecting temperature and flow-velocity;Da-Kuan;Journal of Applied Optics,2006

3. Polyimide membrane with ZnO piezoelectric thin film pressure transducer as a differential pressure liquid flow sensor;Kuoni;Journal of Micromechanics and Microengineering,2003

4. A microcantilever-based gas flow sensor for flow rate and direction detection;Ma;Microsystem Technology,2009

5. Stress-driven AlN cantilever-based flow sensor for fish lateral line system;Qualtieri;Microelectronics Engineering,2011

Cited by 22 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Gas Flow Rate Sensing by Curvature Change of Micro Quartz Resonators;2023 IEEE SENSORS;2023-10-29

2. Towards breath sensors that are self-powered by design;Royal Society Open Science;2022-09

3. Oxygen annealing induced enhancement in output characteristics of ZnO based flexible piezoelectric nanogenerators;Journal of Alloys and Compounds;2022-08

4. Anisotropic in-situ stretching-strain engineering of flexible multilayer thin-film nanogenerators with Cu interlayers;Nano Energy;2021-04

5. Study on the suitability of ZnO thin film for dynamic pressure sensing application;International Journal on Smart Sensing and Intelligent Systems;2020