A microcantilever-based gas flow sensor for flow rate and direction detection-Reference-Cited by-同舟云学术

A microcantilever-based gas flow sensor for flow rate and direction detection

Published:2008-11-20 Issue:8 Volume:15 Page:1201-1205
ISSN:0946-7076
Container-title:Microsystem Technologies
language:en
Short-container-title:Microsyst Technol

Author:

Ma Rong-Hua,Chou Po-Cheng,Wang Yu-Hsiang,Hsueh Tzu-Han,Fu Lung-Ming,Lee Chia-Yen

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1007/s00542-008-0737-6.pdf

Reference9 articles.

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2. Kim S, Nam T, Park S (2004) Measurement of flow direction and velocity using a micromachined flow sensor. Sens Actuators A Phys 114:312–318. doi: 10.1016/j.sna.2003.12.019

3. Lee CY, Lee GB (2003) Micromachine-based humidity sensors with integrated temperature sensors for signal drift compensation. J Micromech Microeng 13:620–627. doi: 10.1088/0960-1317/13/5/313

4. Lee CY, Chiang CM, Wang YH, Ma RH (2006) A self-heating gas sensor with integrated NiO thin-film for formaldehyde detection. Sens Actuators B Chem 122:503–510. doi: 10.1016/j.snb.2006.06.018

5. Makinwa KAA, Huijsing JH (2002) Constant power operation of a two-dimensional flow sensor using thermal sigma–delta modulation techniques. Proc IEEE IMTC 1:1577–1580

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