Smart Sensing for Intelligent Machinery: Part I - Highly Sensitive Flow Sensor with A Flexible Hinge and A Double-deck Annular Capacitor Array
Author:
Affiliation:
1. Jilin University,Micro Engineering and Micro Systems Laboratory (JML), School of Mechanical and Aerospace Engineering (SAME),Changchun,China,130022
2. AIST,Research Center for Ubiquitous MEMS and Micro Engineering,Tsukuba,Japan,305-8564
Funder
National Natural Science Foundation of China
Jilin University
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9911657/9911709/09911732.pdf?arnumber=9911732
Reference27 articles.
1. A liquid crystal polymer membrane MEMS sensor for flow rate and flow direction sensing applications
2. High-resolution hot-film measurement of surface heat flux to an impinging jet
3. Aircraft Aerodynamic Parameter Detection Using Micro Hot-Film Flow Sensor Array and BP Neural Network Identification
4. A self-resonant micro flow velocity sensor based on a resonant frequency shift by flow-induced vibration
5. A self-bended piezoresistive microcantilever flow sensor for low flow rate measurement
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