Micromachined ultrasonic motor based on parametric polycrystalline silicon plate excitation-Reference-Cited by-同舟云学术

Micromachined ultrasonic motor based on parametric polycrystalline silicon plate excitation

Published:2007-06 Issue:1 Volume:137 Page:120-128
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Kaajakari Ville,Lal Amit

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference20 articles.

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4. Automated assembly of flip-up micromirrors;Reid,1997

5. Parametric excitation of circular micromachined polycrystalline silicon disks;Kaajakari;Appl. Phys. Lett.,2004

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