A closed-form approach for frequency tunable comb resonators with curved finger contour-Reference-Cited by-同舟云学术

A closed-form approach for frequency tunable comb resonators with curved finger contour

Published:2008-02 Issue:2 Volume:141 Page:523-529
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Lee Ki Bang,Lin Liwei,Cho Young-Ho

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

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5. A triangular electrostatic comb array for micromechanical resonant frequency tuning;Bang Lee;Sens. Actuators,1998

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