A new hybrid mount actuator consisting of air spring and magneto-rheological damper for vibration control of a heavy precision stage-Reference-Cited by-同舟云学术

A new hybrid mount actuator consisting of air spring and magneto-rheological damper for vibration control of a heavy precision stage

Published:2018-12 Issue: Volume:284 Page:42-51
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Han Chulhee,Choi Seung-Bok,Lee Yang-Sup,Kim Hyung-Tae,Kim Cheol-Ho

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference23 articles.

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3. Vibration criteria for metrology laboratories;Bessason;Meas. Sci. Technol.,1999

4. Investigation on harmonic response of pneumatic vibration isolation system with single and double-frequency excitations;Zhong;Appl. Mech. Mater.,2010

5. Modeling and sensitivity analysis of a pneumatic vibration isolation system with two air chambers;Moon;Mech. Mach. Theory,2010

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