Author:
Gromova M.,Mehta A.,Baert K.,Witvrouw A.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference15 articles.
1. Poly-SiGe, a superb material for MEMS;Witvrouw;Proc. MRS,2004
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4. The novel use of low temperature hydrogenated microcrystalline silicon germanium for MEMS applications;Gromova;Microelectron. Eng.,2004
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