Lorentz force based resonant MEMS magnetic-field sensor with optical readout-Reference-Cited by-同舟云学术

Lorentz force based resonant MEMS magnetic-field sensor with optical readout

Published:2016-04 Issue: Volume:241 Page:12-18
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Park Byoungyoul^ORCID,Li Meiting,Liyanage Sampath,Shafai Cyrus

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference15 articles.

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4. Measurement of the spatial sensitivity of miniature SQUIDs using magnetic-tipped STM;Josephs-Franks;Supercond. Sci. Technol.,2003

5. A resonant magnetic field microsensor with high quality factor at atmospheric pressure;Herrera-May;J. Micromech. Microeng.,2009

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