A novel single-short-pulse MEMS upstream thermal flow sensor for gases also measuring thermal conductivity and thermal diffusivity-Reference-Cited by-同舟云学术

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A novel single-short-pulse MEMS upstream thermal flow sensor for gases also measuring thermal conductivity and thermal diffusivity

Published:2019-08 Issue: Volume:295 Page:23-30
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Hammerschmidt U.,Sosna C.,Benkert A.,Meier A.,Völklein F.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference40 articles.

1. Fundamentals of Hot Wire Anemometry;Lomas,1986

2. Hot-Wire Anemometry;Bruun,1995

3. Thermal and Flow Measurements;Lee,2008

4. Thermal Anemometry Grid Sensor

5. Micromachined Thermal Flow Sensors—A Review

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1. A 7.25 μ K Ultrahigh Resolution MEMS Resonant Thermometer;IEEE Sensors Journal;2024-04-15

2. Transient Hot Strip On-a-Chip;International Journal of Thermophysics;2023-04-12

3. Modelling and Characterization of an Electro-Thermal MEMS Device for Gas Property Determination;2023 Smart Systems Integration Conference and Exhibition (SSI);2023-03-28

4. Micromachined Thermal Time-of-Flight Flow Sensors and Their Applications;Micromachines;2022-10-13

5. Flow-insensitive micro-thermal conductivity detector with semi-diffusion gas channel;Journal of Micromechanics and Microengineering;2022-07-22

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