Author:
Rezaeisaray Mehdi,Gowini Mohamed El,Sameoto Dan,Raboud Don,Moussa Walied
Funder
CMC Microsystems
Natural Sciences and Engineering Research Council of Canada
Alberta Innovates – Technology Futures
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference35 articles.
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5. A CMOS-compatible piezoelectric vibration energy scavenger based on the integration of bulk PZT films on silicon, IEEE International Electron Devices Meeting (IEDM);Aktakka,2010
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